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US 7,466,474 B2Granted
Micromechanical device with tilted electrodes
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsDenis Jung, Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose
Life of this patent
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Abstract
A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.
Claims23
A micromechanical device, comprising:
- a micromechanical functional structure, which can be deflected about a main axis from a rest position;
- a movable electrode, which is mounted to the micromechanical functional structure;
- and
- a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.
1 more element
Dependencies are inferred from the claim text.