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US 7,466,069 B2Granted
Carbon nanotube device fabrication
AssigneePresident and Fellows of Harvard College
InventorsJene A. Golovchenko, Haibing Peng
Life of this patent
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Abstract
A carbon nanotube device in accordance with the invention includes a support structure including an aperture extending from a front surface to a back surface of the structure. At least one carbon nanotube extends across the aperture and is accessible through the aperture from both the front surface and the back surface of the support structure.
Claims23
A carbon nanotube device comprising:
- a substrate including an aperture extending from a front surface to a back surface of the substrate, with the aperture open only at the front surface and the back surface;
- at least one pair of electrically conducting contact pads disposed on a selected one of the front and back substrate surfaces with the conducting contact pads in a given pair of pads being separated from each other by the aperture;
- a carbon nanotube catalyst region disposed on top of each of the contact pads in alignment with an edge of the aperture and exposed at the selected substrate surface;
- and
- at least one carbon nanotube extending across the aperture and accessible through the aperture from both the front surface and the back surface of the substrate, each end of the carbon nanotube contacting an exposed catalyst region on a contact pad at the selected substrate surface.
2 more elements
Dependencies are inferred from the claim text.