Piezoelectric driving type MEMS apparatus

A piezoelectric driving type MEMS apparatus comprising:

• a supporting portion provided on a substrate;
• a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator,
• wherein the piezoelectric actuator further comprises an insulating film supported by the supporting portion in a both end supporting and a first electrode provided at a central portion of the insulating film, the driving electrode has a first driving electrode and a second driving electrode, the first driving electrode is provided on each of both end portions of the insulating film so as to be electrically separated from the first electrode, the piezoelectric film is provided on the first driving electrode, and the second driving electrode is provided on the piezoelectric film;
• and
• a second electrode is provided on the substrate so as to be opposed to the first electrode,
• wherein the slits are plural, and the respective slits penetrate the insulating film, the first driving electrode, the piezoelectric film and the second driving electrode.

A piezoelectric driving type MEMS apparatus, comprising:

• a supporting portion provided on a substrate;
• a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode configured to drive the piezoelectric film, the piezoelectric film in the piezoelectric actuator having at least one slit extending along a longitudinal direction of the piezoelectric actuator,
• wherein a first electrode is provided on the substrate,
• the piezoelectric actuator further comprises an insulating film supported by the supporting portion in a both end supporting and a second electrode provided on a central portion of the insulating film so as to be opposed to the first electrode, and
• the driving electrode comprises a first driving electrode and a second driving electrode, the first driving electrode is provided on each of both end portions on a face of the insulating film which is opposed to the first electrode so as to be electrically separated from the first electrode, the piezoelectric film is provided on the first driving electrode, and the second driving electrode is provided on the piezoelectric film,
• wherein the slits are plural, and the respective slits penetrate the insulating film, the first driving electrode, the piezoelectric film and the second driving electrode.