Semiconductor device having super junction structure

A super junction type semiconductor device comprising:

• a first semiconductor layer of a first conductivity type;
• a super junction structure located over the first semiconductor layer in which a plurality of pairs of first and second conductivity type regions are alternately arranged, wherein the first conductivity type region of the super junction structure is connected to the first semiconductor layer, and the super junction structure has a first region which is a cell region of the device and a second region which is a peripheral region of the device, the second region neighboring the first region;
• a semiconductor element located in the first region and having an electrode that is electrically connected to the second conductivity type region of the super junction structure;
• a second semiconductor layer of a second conductivity type located on the second region and having a contact portion for electrically connecting the second semiconductor layer with the electrode, wherein the second semiconductor layer has a certain geometry for spacing the contact portion apart from the super junction structure in the second region, wherein
• the second semiconductor layer is located on the first region and the thickness of the second semiconductor layer at the first region is less than the thickness of the second semiconductor layer near the contact portion in the second region;
• and
• the second semiconductor layer has an impurity concentration distribution such that the impurity concentration in the second region is lower than that in the first region.