Capacitor structures

A capacitor structure comprising:

• a first capacitor electrode having a silicon-containing surface;
• a capacitor dielectric layer including:
• a first metal-containing dielectric layer consisting of metal oxide and contacting the silicon-containing surface, the metal of the first metal-containing layer being selected from Group IVB of the Periodic Table of the Elements;
• and
• a second metal-containing dielectric layer consisting of metal oxide and contacting the first metal-containing dielectric layer, the metal of the second metal-containing layer being selected from Group IIIB of the Periodic Table of the Elements;
• and
• a second capacitor electrode overlying the second metal-containing dielectric layer.

A capacitor structure comprising:

• a first capacitor electrode having a silicon-containing surface;
• a dielectric layer including:
• a first dielectric layer consisting of hafnium oxide and contacting the silicon-containing surface;
• and
• a second dielectric layer consisting of lanthanum oxide and contacting the first dielectric layer;
• and
• a second capacitor electrode overlying the dielectric layer.

A capacitor structure comprising:

• a first capacitor electrode having a silicon-containing surface;
• a dielectric layer consisting of:
• a first dielectric layer consisting of metal oxide and contacting the silicon-containing surface, the metal of the first dielectric layer being selected from Group IVB of the Periodic Table of the Elements;
• and
• a second dielectric layer consisting of metal oxide and contacting the first dielectric layer, the metal of the second dielectric layer being selected from Group IIIB of the Periodic Table of the Elements;
• and
• a second capacitor electrode overlying the dielectric layer.