Testing method for semiconductor device, testing apparatus therefor, and semiconductor device suitable for the test

A measuring apparatus comprising:

• an FIB irradiation device for irradiating an FIB to a measured object from one angle;
• an electron beam irradiation device for irradiating an electron beam to the measured object from another angle;
• an electron beam detecting device for detecting the electron beam transmitted through the measured object;
• and
• an electron beam diaphragm provided between the electron beam detecting device and the measured object and capable of adjusting an opening through which the electron beam passes;
• characterized in that the diaphragm is formed by disposing eight rectangular plates each including a first opening at a central portion thereof such that one rectangular plate of the eight rectangular plates is disposed at an angle of 0 degree and the other rectangular plates are sequentially superimposed each with an angle of 45 degrees, with the first openings partially overlapped with one another, and
• that the eight rectangular plates are slid by an equal amount along the respective disposition angles thereof with respect to a second opening formed by a common portion of the first openings of the eight rectangular plates, to thereby adjust the size of the second opening.

A measuring apparatus comprising:

• an FIB irradiation device for irradiating an FIB to a measured object from a horizontal direction;
• an electron beam irradiation device for irradiating an electron beam to the measured object from a vertical direction;
• an electron beam detecting device for detecting the electron beam transmitted through the measured object;
• and
• an electron beam diaphragm provided between the electron beam detecting device and the measured object and capable of adjusting an opening through which the electron beam passes;
• wherein that the diaphragm is formed by disposing eight rectangular plates each including a first opening at a central portion thereof such that one rectangular plate of the eight rectangular plates is disposed at an angle of 0 degree and the other rectangular plates are sequentially superimposed each with an angle of 45 degrees, with the first openings partially overlapped with one another, and
• wherein the eight rectangular plates are slid by an equal amount along the respective disposition angles thereof with respect to a second opening formed by a common portion of the first openings of the eight rectangular plates, to thereby adjust the size of the second opening.