Back to results
US 7,465,629 B2Granted
Flash memory and method for manufacturing the same
AssigneeDongbu Electronics Co., Ltd.
InventorSang Woo Nam
Life of this patent
Estimating the term…
Abstract
Provided are a flash memory and a method for manufacturing the same. The flash memory includes a semiconductor substrate having a device isolation region and an active region; a stacked gate on the semiconductor substrate; an insulation layer covering the semiconductor substrate and the stacked gate; a drain contact penetrating the insulation layer on one side of the stacked gate; and a source line penetrating the insulation layer on an opposite side of the stacked gate.
Claims18
A method for manufacturing a flash memory, the method comprising:
- forming a device isolation region and an active region on a semiconductor substrate;
- forming a stacked gate on the active region by a process comprising forming a gate insulation layer on the semiconductor substrate, forming a floating gate on the gate insulation layer, forming a dielectric layer on the floating gate, and forming a control gate on the dielectric layer,
- forming source and drain regions on opposite sides of the stacked gate;
- forming salicide on a top surface of the stacked gate and on the drain regions;
- and
- forming a drain contact on the salicide on the drain region, and a source line directly on the source regions, such that the source line is formed higher than the salicide.
3 more elements
Dependencies are inferred from the claim text.