Measuring apparatus, method of measuring surface texture and computer readable medium having program for measuring surface texture
AssigneeMitutoyo Corporation
InventorNobuhiro Ishikawa
Life of this patent
Estimating the term…
Abstract
An arithmetic unit 212 is a correction filter 212a based on the relative displacement characteristics between a scale unit 19b and the end of a slider 16, and calculates a measured value by adding up together the displacement of the stylus tip 17a and a value found by applying the correction filter 212a to the displacement of the slider 16 detected by the scale unit 19b.
Claims16
A measuring apparatus comprising:
- a scanning probe having, at an end thereof, a stylus tip that comes in contact with an object to be measured to take a measurement by scanning;
- a slider which is allowed to freely move supporting the scanning probe at an end thereof;
- a scale unit for detecting a displacement of the slider;
- an stylus tip displacement detector unit for detecting a displacement of the stylus tip of the scanning probe with respect to the end of the slider;
- and
- an arithmetic unit, which has a correction filter based on a relative displacement characteristics between the scale unit and the end of the slider, for calculating a measured value based on a value found by applying the correction filter to the displacement of the slider detected by the scale unit and on the displacement of the stylus tip detected by the stylus tip displacement detector unit.
A method of measuring surface texture to measure an object that is to be measured by using a measuring apparatus which comprises a scanning probe having, at an end thereof, an stylus tip that comes in contact with an object to be measured to take a measurement by scanning, a slider which is allowed to freely move supporting the scanning probe at an end thereof, a scale unit for detecting a displacement of the slider, and an stylus tip displacement detector unit for detecting a displacement of the stylus tip of the scanning probe with respect to the end of the slider, the method comprising steps of:
- detecting the displacement of the slider by the scale unit;
- detecting the displacement of the stylus tip of the scanning probe with respect to the end of the slider by the stylus tip displacement detector unit;
- and
- calculating a measured value based on a value found by applying a correction filter based on a relative displacement characteristics between the scale unit and the end of the slider to the displacement of the slider detected by the scale unit and on the displacement of the stylus tip detected by the stylus tip displacement detector unit.
A computer readable medium having a program for measuring surface texture including instructions for permitting a computer to execute a measurement of an object that is to be measured by using a measuring apparatus which comprises a scanning probe having, at an end thereof, an stylus tip that comes in contact with an object to be measured to take a measurement by scanning, a slider which is allowed to freely move supporting the scanning probe at an end thereof, a scale unit for detecting a displacement of the slider, and an stylus tip displacement detector unit for detecting a displacement of the stylus tip of the scanning probe with respect to the end of the slider, the instructions comprising steps of:
- detecting the displacement of the slider by the scale unit;
- detecting the displacement of the stylus tip of the scanning probe with respect to the end of the slider by the stylus tip displacement detector unit;
- and
- calculating a measured value based on a value found by applying a correction filter based on a relative displacement characteristics between the scale unit and the end of the slider to the displacement of the slider detected by the scale unit and on the displacement of the stylus tip detected by the stylus tip displacement detector unit.
Dependencies are inferred from the claim text.