Method of fabricating inkjet nozzle chambers having filter structures
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
Life of this patent
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Abstract
A method of fabricating a plurality of inkjet nozzles on a substrate. The method comprises the steps of: (a) providing a substrate having a plurality of trenches corresponding to ink inlets; (b) depositing sacrificial material so as fill the trenches and form a scaffold on the substrate; (c) defining openings in the sacrificial material; (d) depositing roof material over the sacrificial material to form nozzle chambers and filter structures simultaneously; (e) etching nozzle apertures through the roof material; and (f) removing the sacrificial material.
Claims16
A method of fabricating a plurality of inkjet nozzles on a substrate, each nozzle comprising a nozzle chamber having a roof spaced apart from said substrate and sidewalls extending from said roof to said substrate, one of said sidewalls having a chamber entrance for receiving ink from at least one ink inlet defined in said substrate, said chamber entrance including at least one filter structure, said method comprising the steps of:
- (a) providing a substrate having a plurality of trenches corresponding to said ink inlets;
- (b) depositing sacrificial material on said substrate so as fill said trenches and form a scaffold on said substrate;
- (c) defining openings in said sacrificial material, said openings being positioned to form said chamber sidewalls and said at least one filter structure when filled with roof material;
- (d) depositing roof material over said sacrificial material to form simultaneously said nozzle chambers and said at least one filter structure;
- (e) etching nozzle apertures through said roof material, each nozzle chamber having at least one nozzle aperture;
- and
- (f) removing said sacrificial material.
Dependencies are inferred from the claim text.