Cleaning apparatus

A cleaning apparatus cleaning a deposition mask used for depositing organic electroluminescent materials, comprising:

• a cleaning tank containing a cleaning solution therein and configured to receive the deposition mask for cleaning;
• a vacuum evaporator receiving the cleaning solution from the cleaning tank and evaporating the cleaning solution in a vacuum;
• a first cooler cooling the cleaning solution evaporated by the vacuum evaporator;
• a first return pipe returning the cleaning solution cooled by the first cooler to the cleaning tank;
• a rinse tank containing a rinse solution therein and configured to receive the deposition mask cleaned in the cleaning tank;
• an atmospheric evaporator receiving the rinse solution from the rinse tank and evaporating the rinse solution in an atmospheric pressure;
• a second cooler cooling the rinse solution evaporated by the atmospheric evaporator;
• and
• a second return pipe returning the rinse solution cooled by the second cooler to the rinse tank.