Back to results
US 7,461,559 B2Granted
Electromechanical transducer and method of fabricating the same
AssigneeCitizen Holdings Co., Ltd.
InventorToru Takizawa
Life of this patent
Estimating the term…
Abstract
A weight part (12) is supported by a beam part (26) in a slim piece shape supported by a frame-shaped support part (10), and the beam part (26) is provided with a piezoresistance element (20) as a transducing element that transduces a mechanical variation to an electrical variation, so that a mechanical variation of the weight part (12) is transmitted to the piezoresistance element (20) via the beam part (26). Then, the beam part (26) is constructed by stacking the silicon nitride film (16) and a resin film (18) such as a polyimide film.
Claims9
An electromechanical transducer comprising:
- a transducing element transducing a mechanical variation into an electrical variation;
- a weight part for applying a mechanical variation to the transducing element;
- a beam part in a slim piece shape that supports the weight part and is provided with the transducing element;
- and
- a frame-shaped support part supporting the beam part,
- wherein
- the weight part and the support part area formed of a silicon semiconductor substrate, the beam part is constructed by stacking a silicon nitride film and a resin film without the silicon semiconductor substrate, and the transducing element extends from a region above the frame-shaped support part into a portion between the silicon nitride film and the resin film of the beam part.
4 more elements
Dependencies are inferred from the claim text.