Device for stabilizing a workpiece during processing
AssigneeInfineon Technologies AG
InventorsWolfgang Tischner, Carsten Von Koblinski
Life of this patent
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Abstract
A device that stabilizes a workpiece during processing includes a first workpiece carrier part, a second work piece carrier part, and a fixing unit that mutually fixes the workpiece carrier parts in such a way that the workpiece is held between the first and-second workpiece carrier parts. The first workpiece carrier part has a patterned mask. In this way, the production costs can be significantly reduced particularly in the case of workpieces at risk of fracture.
Claims21
A device that stabilizes a workpiece during processing comprising:
- a first workpiece carrier part;
- a second workpiece carrier part;
- and
- a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, wherein the patterned mask comprises a thickness of about 10 to 250 μm.
An apparatus for stabilizing a workpiece during processing comprising:
- a first workpiece carrier part;
- a second workpiece carrier part;
- and
- means for mutually fixing the workpiece carrier pads in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask.
A device that stabilizes a workpiece during processing comprising;
- a first workpiece carrier part;
- a second workpiece carrier part;
- and
- a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, and wherein the fixing unit comprises an articulation.
A device that stabilizes a workpiece during processing comprising:
- a first workpiece carrier part;
- a second workpiece carrier part;
- and
- a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, wherein the patterned mask comprises a metallic material, a ceramic, or a plastic.
Dependencies are inferred from the claim text.