US 7,460,292 B2 · Interferometric modulator with internal polarization and drive method

Abstract

A method of creating an internal dipole moment in an interferometric light modulating device is disclosed. In certain embodiments, the method includes applying heat and an electrical field to a dielectric layer of an interferometric light modulating device. Before this method, the dielectric layer has mobile charges or includes random dipoles. After this method, however, those random dipoles are substantially aligned, thereby inducing a fixed dipole moment in the dielectric layer. The electric field creates the dipole moment in the dielectric layer and the heat helps increase the speed of the process by supplying additional activation energy. Having a dielectric layer with an induced dipole moment provides an internal voltage source that provides at least a portion of the voltage required to operate the interferometric light modulating device. The induced dipole moment also reduces the possibility of an uncontrolled shift of charge within the device during operation.

Claims33

Dependent claims

A microelectromechanical systems (MEMS) device, comprising:

a first electrode;
a second electrode substantially reflective of light;
a first layer located between the first and second electrodes, the first layer comprising a non-zero dipole moment when no voltage is applied across the first and second electrodes;
and
a second layer at least partially reflective of light, the second electrode in operable proximity to the second layer, wherein the second electrode is movable with respect to the second layer upon application of a voltage across the first and second electrodes.

2 more elements

Dependencies are inferred from the claim text.

Interferometric modulator with internal polarization and drive method

Life of this patent

Interferometric modulator with internal polarization and drive method

Life of this patent

Abstract

Claims33