Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer

A method of fabricating a fuse for an integrated circuit, the method comprising:

• forming an at least partially freestanding dielectric spacer above a supporting structure;
• conformably forming a fuse element of the fuse over at least a portion of the freestanding dielectric spacer, wherein the fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers;
• and
• wherein forming the freestanding dielectric spacer comprises forming the freestanding dielectric spacer with a quadrant-shaped cross-section.

A method of fabricating a fuse for an integrated circuit, the method comprising:

• forming an at least partially freestanding dielectric spacer above a supporting structure;
• conformably forming a fuse element of the fuse over at least a portion of the freestanding dielectric spacer, wherein the fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers;
• and
• wherein the fuse comprises a first terminal portion and a second terminal portion interconnected by the fuse element, and wherein the freestanding dielectric spacer is thermally insulating, and the conformably forming of the fuse element comprises forming the fuse element over the at least a portion of the freestanding dielectric spacer, with the upper surface of the fuse element being convex for a majority of the distance between the first terminal portion and the second terminal portion of the fuse.