Rotary apertured interferometric lithography (RAIL)
AssigneeSeagate Technology LLC
InventorKoichi Wago
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Abstract
A rotary apertured interferometric lithography (RAIL) system that includes interferometric lithography tools, a mask with a slit preferably with an arc shape, and a rotating stage is disclosed. The RAIL system could create a servo pattern of a recording-head trajectory of a hard disk drive in a master for magnetic-contact printing. The master can could be used to form arrays of sub-micron sized magnetic elements on a magnetic disk media for high-density magnetic recording applications.
Claims13
A rotary apertured interferometric lithography (RAIL) system comprising an interferometric tool, a rotating stage, at least two interfering laser beams and a mask having an aperture that creates a servo pattern in a master for magnetic-contact printing, wherein the master has a feature having a size of less than 0.35 micron and a standard deviation of a period of the servo pattern is less than 1 nm, wherein the aperture is an arc-shaped slit, wherein the chord of the arc-shaped slit extends substantially radially from near the center of the rotating stage to near the perimeter of the rotating stage.
Dependencies are inferred from the claim text.