System and method of measuring and mapping three dimensional structures
AssigneeAMO Wavefront Sciences, LLC
InventorsDaniel R. Neal, Richard James Copland, David A. Neal
Life of this patent
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Abstract
A system for mapping a three-dimensional structure includes a projecting optical system adapted to project light onto an object, a correction system adapted to compensate the light for at least one aberration in the object, an imaging system adapted to collect light scattered by the object and a wavefront sensor adapted to receive the light collected by the imaging system and to sense a wavefront of the received light. For highly aberrated structures, a number of wavefront measurements are made which are valid over different portions of the structure, and the valid wavefront data is stitched together to yield a characterization of the total structure.
Claims25
A system for measuring an optical characteristic of an optically transmissive object, comprising:
- a projecting optical system adapted to project light through an optically transmissive object;
- a correction system adapted to at least partially compensate a light beam projected through the optically transmissive object for at least one optical property of the optically transmissive object;
- an imaging system adapted to collect the light that has been projected through the optically transmissive object;
- a wavefront sensor adapted to receive the light collected by the imaging system and to sense a wavefront of the received light;
- and
- a test structure located between the projecting optical system and the wavefront sensor, the test structure being adapted to receive the optically transmissive object.
A method of measuring an optical quality of an optically transmissive object, comprising:
- (a) projecting a light beam through an optically transmissive object from a first side of the optically transmissive object;
- (b) at least partially compensating the light beam for at least one optical property of the optically transmissive object;
- (c) collecting the light beam at a second side of the optically transmissive object opposite the first side, and providing the collected light to a wavefront sensor;
- and
- (d) sensing at the wavefront sensor a wavefront of the collected light.
A method of measuring an optically transmissive object, comprising:
- (a) projecting a light beam through at least a portion of an optically transmissive object;
- (b) collecting light passed through the portion of the optically transmissive object;
- (c) sensing at a wavefront sensor a wavefront of the collected light passed through the portion of the optically transmissive object;
- (d) repeating steps (a) though (c) for a plurality of different portions of the optically transmissive object that together span a target area of the optically transmissive object;
- and
- (e) stitching together the sensed wavefronts to produce a complete measurement of the target area of the optically transmissive object.
A method of measuring an optically transmissive object, comprising:
- (a) locating a light source a first distance from an optically transmissive object;
- (b) projecting a light beam from the light source through the optically transmissive object;
- (c) collecting light projected through the optically transmissive object;
- (d) sensing a wavefront comprising a difference between a wavefront of the collected light and a reference wavefront;
- (e) changing the distance between the light source and the optically transmissive object;
- (f) repeating steps (b) though (e) to produce N sensed wavefronts;
- and
- (g) stitching together the N sensed wavefronts to produce a complete measurement of the target area of the surface of the optically transmissive object.
Dependencies are inferred from the claim text.