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US 7,453,623 B2Granted
Reflecting mirror and exposure apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorsShinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito, Shigeo Sakino
Life of this patent
Estimating the term…
Abstract
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
Claims15
A mirror apparatus comprising:
- a mirror including a rear surface and a reflecting surface configured to reflect light;
- a partition member defining a plurality of gas chambers on a side of the rear surface of the mirror, a part of the rear surface, the part being one of a plurality of parts divided within an effective diameter range of the mirror, forming a part of an inside surface of the plurality of gas chambers;
- a regulator regulating gas pressure in each gas chamber in order to apply a deformation force to the part of the rear surface;
- a measuring unit configured to measure the gas pressure in each gas chamber;
- and
- a measuring unit configured to measure gas pressure outside of the gas chambers,
- wherein the gas pressure in each gas chamber is regulated so as to control differential pressure between the gas chambers and the outside of the chambers in order to deform the shape of the mirror.
4 more elements
A mirror apparatus comprising:
- a mirror including a rear surface and a reflecting surface configured to reflect light;
- a partition member defining a plurality of gas chambers on a side of the rear surface of the mirror and around an axis perpendicular to a center of the reflecting surface of the mirror, a part of the rear surface, the part being one of a plurality of parts divided within an effective diameter range of the mirror, forming a part of an inside surface of the plurality of gas chambers;
- a regulator regulating gas pressure in each gas chamber in order to apply a deformation force to the part of the rear surface;
- a measuring unit configured to measure the gas pressure in each gas chamber;
- and
- a measuring unit configured to measure gas pressure outside of the gas chambers,
- wherein the gas pressure in each gas chamber is regulated so as to control differential pressure between the gas chambers and the outside of the chambers in order to deform the shape of the mirror.
4 more elements
Dependencies are inferred from the claim text.