Process for making FinFET device with body contact and buried oxide junction isolation

A process for making a FinFET device, comprising:

• a) providing a bulk silicon substrate;
• b) forming a first oxide layer on the substrate;
• c) forming a nitride layer on the first oxide layer;
• d) forming a first photoresist layer on the nitride layer;
• e) etching portions of the nitride layer and strip portions of the first photoresist layer to yield a single fin of the nitride layer and the photoresist layer extending from a first side of the substrate to an opposing second side of the substrate thereof;
• f) implanting oxygen into the substrate at a third side and an opposing fourth side thereof to form two parallel oxide regions extending from the first side of the substrate to the second side of the substrate with the two parallel oxide regions being separated by a separation region of the substrate that extends from the first side to the second side and is substantially free of implantation;
• g) etching the first photoresist layer from the nitride layer;
• h) annealing the substrate to bury the oxide regions within the substrate;
• i) etching away the portions of the substrate proximal to the third and fourth sides down to the buried oxide regions to yield a rectangular, vertically extending fin of substrate and the nitride layer;
• j) forming a second oxide layer on the upper surface of the fin;
• k) forming a conductive layer on the upper surfaces of the oxide regions and the second oxide layer wherein the conductive layer has an exposed surface;
• l) imprinting a lithographic pattern into the exposed surface of the conductive layer at a medial portion thereof extending from the third side to the fourth side;
• m) forming a second layer of photoresist on the lithographic pattern;
• n) etching away the portions of the conductive layer and portions of the nitride layer not covered by the second layer of photoresist;
• o) implanting oxygen to form an oxide the separation region at the first and second sides partly therein so as to form opposing oxide subregions and an interior subregion that is substantially free of oxide formation and is integrally connected to the remainder of the substrate;
• p) etching away the second layer of photoresist;
• and
• q) annealing the substrate to bury the oxide subregions within the substrate.