Molecular glass photoresists
AssigneeCornell University
InventorsEkmini Anuja De Silva, Drew C. Forman, Christopher K. Ober
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Abstract
Several small molecule, molecular glasses are disclosed with new architectures designed for use as photoresists in semiconductor lithography. The disclosed photoresists are low molecular weight organic materials that demonstrate a glass transition temperature significantly above room temperature as well as a low tendency towards crystallization. The molecular glass photoresists have a tetrahedral silane molecular core with four phenyl groups or four biphenyl groups. Each phenyl group or each outer phenyl group of a biphenyl group has a methoxy or hydroxy group at the 3- or 4-position. For the biphenyl embodiments, the linkage may be meta-meta, meta-para, para-para or para-meta.
Claims9
A photoresist for use in lithographic processes, the photoresist comprising:
- a tetrahedral silane molecule comprising a silicon center atom, and four substituted phenyl groups, each substituted phenyl group attached to the silicon center atom, each substituted phenyl group comprising either a first substituent at the 3-position or a second substituent at the 4-position,
- wherein the first substituents are selected from the group consisting of hydroxy, methoxy, 3-hydroxy phenyl, 4-hydroxy phenyl, 3-methoxy phenyl, 4-methoxy phenyl, and combinations thereof, and
- wherein the second substituents are selected from the group consisting of methoxy, 3-hydroxy phenyl, 4-hydroxy phenyl, 3-methoxy phenyl, 4-methoxy phenyl, and combinations thereof.
A photoresist comprising:
- a molecular glass selected from the group consisting of:
- tetrakis (3-methoxyphenyl) silane;
- tetrakis (4-methoxyphenyl) silane;
- tetrakis (3-hydroxyphenyl) silane;
- tetrakis (3-hydroxy-3-biphenyl) silane;
- tetrakis (4-hydroxy-3-biphenyl) silane;
- tetrakis (3-hydroxy-4-biphenyl) silane;
- tetrakis (4-hydroxy-4-biphenyl) silane;
- tetrakis (3-methoxy-3-biphenyl) silane;
- tetrakis (4-methoxy-3-biphenyl) silane;
- tetrakis (3-methoxy-4-biphenyl) silane;
- tetrakis (4-methoxy-4-biphenyl) silane;
- and
- combinations thereof.
Dependencies are inferred from the claim text.