Back to results
US 7,452,655 B2Granted
Acrylic copolymer and radiation-sensitive resin composition
AssigneeJsr Corporation
InventorsHiroyuki Ishii, Kouichi Fujiwara, Hiroshi Yamaguchi, Yukio Nishimura
Life of this patent
Estimating the term…
Abstract
An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.
Claims12
An acrylic copolymer comprising:
- a recurring unit of the following formula (1),
- a recurring unit of the following formula (2),
- wherein R represents a hydrogen atom or a methyl group;
- R1 individually represents a hydrogen atom, hydroxyl group, or —COOR3 group, wherein R3 is a hydrogen atom, a linear or branched alkyl group having 1-4 carbon atoms or an alicyclic alkyl group having 3-20 carbon atoms, provided that at least one of R1 groups is not a hydrogen atom, and
- a recurring unit of the following formula (3),
- wherein any two of R2 groups form, in combination and together with the carbon atom to which the two R2 groups bond, a divalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, with the remaining R2 being a linear or branched alkyl group having 1-4 carbon atoms, a monovalent alicyclic hydrocarbon group having 4-20 carbon atoms, or a derivative thereof.
3 more elements
An acrylic copolymer consisting essentially of:
- a recurring unit of the following formula (1),
- a recurring unit of the following formula (2),
- wherein R represents a hydrogen atom or a methyl group;
- R1 individually represents a hydrogen atom, hydroxyl group, or —COOR3 group, wherein R3 is a hydrogen atom, a linear or branched alkyl group having 1-4 carbon atoms, or an alicyclic alkyl group having 3-20 carbon atoms, provided that at least one of R1 groups is not a hydrogen atom, and
- a recurring unit of the following formula (3),
- wherein any two of R2 groups form, in combination and together with the carbon atom to which the two R2 groups bond, a divalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, with the remaining R2 being a linear or branched alkyl group having 1-4 carbon atoms, a monovalent alicyclic hydrocarbon group having 4-20 carbon atoms, or a derivative thereof.
3 more elements
Dependencies are inferred from the claim text.