Nanoindentation surface analysis tool and method
AssigneeInternational Business Machines Corporation
InventorsRichard L. Bradshaw, Urs T. Duerig, Bernd W. Gotsmann
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Abstract
The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.
Claims12
A method for measuring the mechanical properties of surface as a function of temperature, load, and the duration of time of applying said temperature and load, said method comprising of the steps of:
- a) providing an array of more than one cantilever tip, wherein each of said tips in said array of tips is spaced at select distances along X and Y axes;
- b) positioning said array of tips relative to the surface;
- c) contacting more than one of said tips in said array of tips with the surface;
- d) heating more than one of said tips in said array of tips to a select temperature;
- e) applying a select load to more than one tip in said array of tips for a select time;
- f) determining the depth of indentation produced by each of said tips;
- and
- g) repeating steps b) to f) positioning said array of tips at select intervals along the X and Y axes, with a first incremental select spacing along the X axis and a second incremental spacing along the Y axis, wherein one parameter selected from the group consisting of temperature, load and time is varied a first incremental select amount between each position along the X axis and a second parameter, different from the first parameter, selected from the group consisting of temperature, time and load is varied a second incremental select amount between each position along the Y axis.
A method for measuring the mechanical properties of surface as a function of temperature, load, and the duration of time of applying said temperature and load, said method comprising of the steps of:
- a) providing an array of more than one cantilever tip, wherein each of said tips in said array of tips is spaced at select distances along X and Y axes;
- b) positioning said array of tips relative to the surface;
- c) contacting more than one of said tips in said array of tips with the surface;
- d) heating more than one of said tips in said array of tips to a select temperature;
- e) applying a select load to more than one tip in said array of tips for a select time;
- f) determining the depth of indentation produced by each of said tips;
- g) repeating steps b) to f) positioning said array of tips at select intervals along the X and Y axes, with a first incremental select spacing along the X axis and a second incremental spacing along the Y axis, wherein said temperature is varied a first incremental select amount between each position along the X axis and the force is varied a second incremental select amount between each position along the Y axis;
- and
- h) repeating step g) wherein a second positioning at select intervals along the X axis is performed with a third incremental select spacing along the X axis, wherein said third incremental spacing is less than said first incremental spacing and wherein a second positioning at select intervals along the Y axis is performed with a fourth incremental select spacing along the Y axis, wherein said fourth incremental spacing is less than said second incremental spacing.
Dependencies are inferred from the claim text.