Method for preparing mask and wafer data files
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsin-Ying Lee, Chien-Chao Huang, Chih-Chiang Tu
Life of this patent
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Abstract
A method for converting a data file into a writer file for a mask writer is provided. A plurality of sub-files is created from the data file. The plurality of sub-files is transferred to the mask writer. A plurality of writer files is created from the plurality of sub-files at the mask writer. The transferring the plurality of sub-files to the mask writer, creating a plurality of writer files from the plurality of sub-files at the mask writer, and checking the plurality of transferred sub-files at the mask writer are executed in parallel in a single process.
Claims17
A method for converting a data file into a writer file for a mask writer, the method comprising:
- creating a plurality of sub-files from the data file;
- transferring the plurality of sub-files to the mask writer;
- and
- creating a plurality of writer files from the plurality of sub-files at the mask writer;
- and
- checking the plurality of transferred sub-files at the mask writer;
- wherein the steps of transferring the plurality of sub-files to the mask writer, creating a plurality of writer files from the plurality of sub-files at the mask writer, and checking the plurality of transferred sub-files at the mask writer are executed in parallel in a single process.
A method for reducing preparation time of a data file of a wafer, the method comprising:
- fracturing the data file into a plurality of sub-files;
- transferring the plurality of sub-files to a writer;
- converting the plurality of sub-files to a plurality of writer files;
- and
- writing a pattern to a wafer at the writer using the plurality of writer files;
- and
- checking the plurality of writer files for errors;
- wherein the steps of transferring of the plurality of sub-files to a writer, converting the plurality of sub-files to a plurality of writer files, and checking the plurality of writer files for errors are performed in parallel in a single process.
A method for providing a pattern file to a writer, comprising:
- splitting the pattern file into a plurality of flat-poly sub-files;
- transferring the plurality of flat-poly sub-files to the writer;
- creating a plurality of writer files from the transferred flat-poly sub-files;
- and
- writing a pattern onto a substrate using the plurality of writer files;
- and
- checking the transferred plurality of flat-poly sub-files at the writer;
- wherein the steps of transferring of the plurality of flat-poly sub-files to the writer, creating a plurality of writer files from the transferred flat-poly sub-files, and checking the transferred plurality of flat-poly sub-files at the writer are performed in parallel in a single process.
Dependencies are inferred from the claim text.