Preparation of microelectromechanical system device using an anti-stiction material and selective plasma sputtering
AssigneeHelwett-Packard Development Company, L.P.
InventorsChien-Hua Chen, Paul Felice Reboa, Charles C. Haluzak
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Abstract
A method for preparing a microelectromechanical system (MEMS) device for subsequent processing is disclosed. The method includes establishing an anti-stiction material on exposed surfaces of the MEMS device. The exposed surfaces include at least an interior surface of a chamber and an external surface of the MEMS device. The anti-stiction material is selectively removed from at least a portion of the external surface via a plasma sputtering process under controlled conditions.
Claims20
A method for preparing a microelectromechanical system (MEMS) device for subsequent processing, the method comprising:
- defining a tortuous path in and along at least a portion of an interior surface of a chamber that is adjacent to a chamber opening through which an anti-stiction coating material is established on an interior surface of the chamber;
- establishing the anti-stiction material on exposed surfaces of the microelectromechanical system device, the exposed surfaces including at least the interior surface of the chamber and an external surface of the MEMS device;
- and
- selectively removing the anti-stiction material from at least a portion of the external surface via a plasma sputtering process under controlled conditions.
A microelectromechanical system (MEMS) device, comprising:
- a substrate;
- a material established on the substrate, the material having an external surface, and defining at least a portion of an interior surface of a chamber formed between the substrate and the material;
- at least one moveable component operatively disposed in the chamber;
- a chamber opening defined in the material;
- a tortuous path defined in and along at least a portion of the interior surface adjacent to the chamber opening;
- an anti-stiction material established on the interior surface and on the at least one moveable component;
- and
- a bonding surface forming at least a portion of the external surface, the bonding surface having had the anti-stiction material established thereon and subsequently removed via a plasma sputtering process under controlled conditions.
Dependencies are inferred from the claim text.