Imprint lithography
AssigneeASML Netherlands B.V.
InventorJoeri Lof
Life of this patent
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Abstract
An imprint lithography apparatus is disclosed which has a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is moveable between a first position and a second position, the first position being such that in use the needle penetrates a layer of imprintable material on the substrate, and the second position being such that in use the needle is disengaged from the imprintable material on the substrate, the substrate table and the needle arranged such that one may be scanned relative to the other.
Claims27
An imprint lithography apparatus comprising a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is one of a plurality of needles which together form an imprint template, each needle is configured to be moveable between the first position and the second position, the first position being such that in use needle penetrates an imprintable material on the substrate, and the second position being such that in use the needle is disengaged from the imprintable material on the substrate, the substrate table and the needle arranged such that one may be moved relative to the other and, in use, the needle causes localized curing of the imprintable material in proximity of the needle.
An imprint lithography apparatus comprising a needle moveable between a first position and a second position, the first position being such that in use the needle penetrates an imprintable material, and the second position being such that in use the needle is disengaged from the imprintable material, wherein the needle is one of a plurality of needles which together form an imprint template, each needle being moveable between the first position and the second position, and comprising a set of templates arranged in a chess-board configuration comprising two or more rows of spaced apart templates.
An imprint lithography apparatus comprising a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is moveable between a first position and a second position, the first position being such that in use the needle penetrates an imprintable material on the substrate, and the second position being such that in use the needle is disengaged from the imprintable material on the substrate, the substrate table and the needle arranged such that one may be moved relative to the other, wherein the needle is one of a plurality of needles positioned in a two-dimensional rectangular grid to form an imprint template, each needle configured to be moveable between the first position and the second position and, in use, the rectangular grid is at an angle relative to the direction of movement.
Dependencies are inferred from the claim text.