AFM cantilevers and methods for making and using same
AssigneeThe Johns Hopkins University
InventorJan H. Hoh
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Abstract
The invention provides high performance cantilevers with optimal combinations of high resonant frequency and low force constant. In one aspect, AFM cantilevers with spring constants in the range 1-10−6 N/m with (fundamental) resonant frequencies in aqueous solutions of 0.1-100 MHz are provided. A high performance cantilever may be made by focused ion beam milling or electron deposition. The high performance cantilevers allow faster scanning, increase the temporal resolution of force measurement, improve measurement sensitivity by reducing cantilever noise, and improve sensitivity by reducing cantilever spring constant.
Claims29
A cantilever for use in a scanning probe microscope comprising a width to thickness ratio of about 3:1 or less and which is smaller in at least one dimension than about 5 μm, and wherein the cantilever comprises a spring constant between 1×10−6 and 0.1 N/m.
A method for producing a cantilever comprising:
- (a) providing a starting material;
- (b) exposing the starting material to an ion beam;
- and (c) removing molecules from the starting material to generate a cantilever which has a width to thickness ratio of about 3:1 or less, and which is smaller in at least one dimension than about 5 μm, and wherein the cantilever comprises a spring constant between 1×10−6 and 0.1 N/m.
A cantilever for use in a scanning probe microscope comprising a width to thickness ratio of about 3:1 or less and which is smaller in at least one dimension than about 5 μm and which is larger in at least one dimension than about 20 nm, and wherein the cantilever comprises spring constant between 1×10−6 and 0.1 N/m.
Dependencies are inferred from the claim text.