Molten-salt-based growth of group III nitrides
AssigneeSandia Corporation
InventorsKaren E. Waldrip, Jeffrey Y. Tsao, Thomas M. Kerley
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Abstract
A method for growing Group III nitride materials using a molten halide salt as a solvent to solubilize the Group-III ions and nitride ions that react to form the Group III nitride material. The concentration of at least one of the nitride ion or Group III cation is determined by electrochemical generation of the ions.
Claims32
A method for growing Group III nitride crystalline material comprising:
- forming a nitride ion by reducing a nitrogen gas;
- forming a Group III cation by oxidizing a liquid Group III metal;
- and
- combining the Group III cation and the nitride ion to form a Group III nitride.
A method for growing Group III nitride crystalline material comprising:
- dissolving a nitride ion precursor to produce a nitride ion in a molten salt solvent;
- forming a Group III cation by oxidizing a liquid Group III metal in the molten salt solvent;
- and
- combining the Group III cation and the nitride ion to form a Group III nitride.
A method for growing Group III nitride crystalline material comprising:
- dissolving a Group III ion precursor to form a Group III cation in a molten salt solvent;
- forming a nitride ion by electrochemically reducing a nitrogen gas in the molten salt solvent;
- and
- combining the Group III cation and the nitride ion to form a Group III nitride.
A method for growing Group III nitride crystalline material comprising:
- dissolving a Group III ion precursor to form a Group III cation in a molten salt solvent;
- dissolving a nitride ion precursor to form a nitride ion in the molten salt solvent;
- forming an excess of a constituent ion by applying an electrochemical potential;
- and
- combining the Group III cation and the nitride ion to form a Group III nitride.
Dependencies are inferred from the claim text.