High pressure chemical vapor trapping method
AssigneeTegal Corporation
InventorTue Nguyen
Life of this patent
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Abstract
A high pressure trapping system is provided to collect chemical vapor by-products in successive stages through chemical reasons conducted at progressively colder temperatures. A hot trap receives chemical vapor exhaust and collects a first waste, typically a solid, as a result of the high temperature completing a chemical reason in the vapor. Surviving gaseous by-products continue to the next process. The following chamber is colder, and collects waste as a solid or a liquid as a result of a chemical process dependent on the cold temperature. Sometimes a third chamber is used for even a colder chemical reaction to collect waste products. As a solid, these waste products are easier to collect, remove, and even reuse.
Claims9
A method to separate and collect elements of a chemical vapor exhaust at a high pressure, the method comprising:
- (a) passing sequentially the exhaust from a processing chamber to a vacuum pump and to a hot trap, and then to a first cold trap, wherein a non-gaseous chemical waste is collected in the hot trap and in the first cold trap, and a gaseous exhaust is thereafter vented;
- (b) collecting any additional non-gaseous waste in a second cold trap before the gaseous exhaust is vented, the second cold trap operatively connected with and positioned downstream of the first cold trap.
Dependencies are inferred from the claim text.