Beam processing system and beam processing method

A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising:

• measuring a beam width of said processing beam;
• setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width;
• and
• based on the number of rotation of said disk per unit time, a scan speed and the number of reciprocating scan times of said reciprocating scan motion, a reversal start timing of said disk at at least one of said inner overscan position and said outer overscan position, and said measured value of the beam width or said predetermined value of the beam width, controlling said reciprocating scan motion so as to ensure an overlap region between a last and a current processing beam irradiation region on each of said plurality of processing objects, said overlap region overlapping at least half of said last processing beam irradiation region.

A beam processing system comprising a disk mounted thereon with a plurality of processing objects on the same circumference, a rotation drive mechanism for rotating said disk about a disk axis, a reciprocating drive mechanism for causing said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and a controller for controlling at least said reciprocating drive mechanism, said beam processing system causing said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects,

• wherein said beam processing system further comprises a beam width measuring unit for measuring a beam width of said processing beam,
• said controller sets said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width, and
• said controller sets a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes smaller than said measured value of the beam width or said predetermined value of the beam width and, after determining the number of reciprocating scan times, sets a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating drive mechanism so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects.

A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising:

• measuring a beam width of said processing beam;
• setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width;
• and
• setting a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes smaller than said measured value of the beam width or said predetermined value of the beam width and, after determining the number of reciprocating scan times, setting a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating scan motion so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects.

A beam processing system comprising a disk mounted thereon with a plurality of processing objects on the same circumference, a rotation drive mechanism for rotating said disk about a disk axis, a reciprocating drive mechanism for causing said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and a controller for controlling at least said reciprocating drive mechanism, said beam processing system causing said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects,

• wherein said beam processing system further comprises a beam width measuring unit for measuring a beam width of said processing beam,
• said controller sets said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width, and
• said controller sets a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes greater than said measured value of the beam width or said predetermined value of the beam width and, after selecting the number of reciprocating scan times, sets a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating drive mechanism so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects.

A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising:

• measuring a beam width of said processing beam;
• setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width;
• and
• setting a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes greater than said measured value of the beam width or said predetermined value of the beam width and, after selecting the number of reciprocating scan times, setting a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating scan motion so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects.