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US 7,411,248 B2Granted
Vertical unipolar component periphery
AssigneeSTMicroelectronics S.r.l.
InventorFrédéric Lanois
Life of this patent
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Abstract
A vertical unipolar component formed in a semiconductor substrate, comprising vertical fingers made of a conductive material surrounded with silicon oxide, portions of the substrate being present between the fingers and the assembly being coated with a conductive layer. The component periphery includes a succession of fingers arranged in concentric trenches, separated from one another by silicon oxide only, the upper surface of the fingers of at least the innermost rank being in contact with said conductive layer.
Claims2
A vertical unipolar component comprising:
- a semiconductor substrate defining a first region and a second periphery region;
- the first region comprising:
- vertical fingers formed so as to penetrate into the substrate, the vertical fingers made of a conductive material surrounded with silicon oxide, with portions of the substrate being present between the fingers;
- and
- a conductive layer covering the first region;
- the second periphery region comprising:
- a succession of fingers arranged in concentric trenches, the succession of fingers comprising an innermost trench having a finger, the succession of fingers separated from one another by silicon oxide only;
- and
- an upper surface of at least the finger of the innermost trench being in contact with the conductive layer.
6 more elements
Dependencies are inferred from the claim text.