Plasma generation apparatus

A plasma generation apparatus, comprising:

• a chamber having a chamber lid and defining an airtight reaction region for generating a plasma;
• a susceptor in the chamber;
• a gas supply means supplying a process gas to the chamber;
• a plasma-inspecting unit measuring a plasma parameter in the chamber;
• a feedback control unit controlling one of the power supply unit and the matching circuit according to information of the plasma parameter;
• and
• a toroidal core module including a toroidal core vertically disposed with respect to the susceptor through the chamber lid, the toroidal core combined with the chamber, the toroidal core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion, comprising:
• a power supply unit generating a radio frequency (RF) power by be connected to an external power supply;
• an induction coil electrically connected to the power supply unit, the induction coil rolling the toroidal core;
• a matching circuit matching an impedance between the power supply unit and the induction coil;
• a housing surrounding the toroidal core, the power supply unit, the induction coil and the matching circuit;
• and
• a rotation driving unit rotating the toroidal core with a predetermined angle and controlled by the feedback control unit in the housing.