Methods of patterning substrates
AssigneeMicron Technology, Inc.
InventorKrupakar M. Subramanian
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AssigneeMicron Technology, Inc.
InventorKrupakar M. Subramanian
Estimating the term…
The invention includes a template comprising one or both of CdS and CdSe adhered to a base in a desired pattern. The base can be any transparent or translucent material, and the desired pattern can include two or more separated segments. The template can be utilized for patterning a plurality of substrates. For instance, the substrates can be provided to have masking layers thereover, and the CdS and/or CdSe can be utilized as catalytic material to sequentially impart patterns in the masking layers. The imparting of the patterns can modify some regions of the masking layers relative to others, and either the modified or unmodified regions can be selectively removed to form patterned masks from the masking layers. Patterns from the patterned masks can then be transferred into the substrates.
A method of patterning a first substrate, comprising:
A method of patterning a plurality of substrates, comprising:
A method of forming a template comprising adhering one or both of CdS and CdSe to a quartz base in a desired pattern;
A method of forming a template comprising adhering one or both of CdS and CdSe to a quartz base in a desired pattern, wherein the one or both of the CdS and CdSe is adhered to the base primarily through van der Waals forces.
A method of forming a template comprising adhering one or both of CdS and CdSe to a quartz base in a desired pattern, wherein the one or both of the CdS and CdSe is adhered to the base with an adhesive that is bonded to both the quartz and the one or both of the CdS and CdSe.
Dependencies are inferred from the claim text.