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US 7,410,816 B2Granted
Method for forming a chamber in an electronic device and device formed thereby
OwnerMakarand Gore, James Guoinventors
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Abstract
A method is disclosed for forming a chamber in an electronic device, including the steps of preparing an outer surface on a solidified core material, the solidified core material in a depression formed in a substrate. The method further includes establishing a layer on the prepared outer surface of the solidified core material and a portion of the substrate surrounding the depression. The established layer and the substrate define a chamber.
Claims24
A method for forming a chamber in an electronic device, the method comprising:
- preparing an outer surface on a solidified bifunctional core material, the solidified bifunctional core material in a depression formed in a substrate;
- and
- establishing a layer on the prepared outer surface of the solidified bifunctional core material and a portion of the substrate surrounding the depression, the established layer and the substrate defining a chamber.
A process for making an optical microelectromechanical device, comprising:
- introducing a bifunctional core material into a cavity defined in a substrate;
- and
- establishing a layer on the bifunctional core material and the substrate, the layer and substrate defining a sealed chamber therebetween.
Dependencies are inferred from the claim text.