Method of fabricating micro-lens and method of fabricating optical module using the method
AssigneeSamsung Electronics Co., Ltd.
InventorsJae-Geol Cho, Sun-Tae Jung
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Abstract
A method of fabricating a micro-lens, and a method of fabricating an optical module using the method are provided. To fabricate a micro-lens, a thin film is formed of a material for the micro-lens on a substrate. A photoresist pattern is formed on the thin film, a thin-film structure is formed by etching the thin film using the photoresist pattern, and the micro-lens is completed by reflow by thermally treating the thin-film structure.
Claims9
A method of fabricating an optical module having a micro-lens integrated therein, comprising the steps of:
- (a) sequentially forming a lower cladding layer and a core layer on a substrate;
- (b) forming a planar lightwave circuit (PLC) pattern on the substrate by selectively etching the core layer and the lower cladding layer;
- (c) forming a PLC by forming an upper cladding layer on the overall surface of the substrate;
- (d) forming a thin-film structure in a lens forming area by selectively removing the upper cladding layer in an area other than the area of the PLC and the lens forming area;
- and
- (e) forming the micro-lens by reflow by thermally treating the thin-film structure.
The method of claim. 1, further comprising:
- (f) forming a non-reflective coating layer on the surface of the micro-lens.
An optical module having a micro-lens integrated therein, comprising:
- a planar lightwave circuit (PLC) comprising a lower cladding layer and a core layer arranged on a substrate to form a PLC area;
- and
- an upper cladding layer arranged on the PLC area and a lens forming area adjacent the PLC area;
- and
- a lens comprising a controlled reflow of the upper cladding arranged on the lens forming area.
Dependencies are inferred from the claim text.