Process for the manufacture of doped semiconductor single crystals, and III-V semiconductor single crystal
AssigneeFreiberger Compound Materials GmbH
InventorsUlrich Kretzer, Stefan Eichler, Thomas Bünger
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AssigneeFreiberger Compound Materials GmbH
InventorsUlrich Kretzer, Stefan Eichler, Thomas Bünger
Estimating the term…
In a process for manufacturing doped semiconductor single crystal comprises solidifying in a crucible, the amount of dopant is added into the semiconductor melt after the beginning of the crystal growth onto the seed crystal, or after at least partial solidification of the semiconductor single crystal in a conical or tapered portion of the crucible. Dopant may be partially added in advance into the crucible, with the remainder added into the semiconductor melt as described. Type III-V semiconductor single crystals or wafers having a diameter of at least about 100 mm, can be prepared having an electrical conductivity of at least about 250 Siemens/cm, and/or an electric resistivity of at most about 4×10−3 Ωcm, and/or a significantly improved ratio of hall mobility to charge carrier concentration.
A process for manufacturing a semiconductor single crystal doped by a dopant, comprising:
Dependencies are inferred from the claim text.