Sputtered ruthenium oxide coatings in electrolytic capacitor
AssigneeGreatbatch Ltd.
InventorsDoug Eberhard, Barry Muffoletto, Wolfram Neff
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Abstract
A capacitor is described. the capacitor includes a casing; a cathode of an active material of at least an oxide of a first metal provided on a substrate, wherein the active material is characterized as being of a substantially homogeneous coating formed by sputtering a target of the first metal in a vacuum chamber; an anode spaced from the cathode coating; and an electrolyte in contact with the cathode coating and the anode. The casing contains the anode, the cathode and the electrolyte. A method and apparatus for providing the sputtered coating is also disclosed.
Claims11
A method for providing a capacitor, comprising the steps of:
- a) providing a casing comprising a first casing portion and a second casing portion;
- b) positioning at least one of the first and second casing portions in a sputter deposition apparatus;
- c) sputtering a target comprised of a first metal in a vacuum chamber of the sputter deposition apparatus, thereby providing a substantially homogeneous coating of the first metal on at least a portion of the at least one casing portion;
- d) housing an anode inside one of the first and second casing portions spaced from the cathode;
- e) mating the first casing portion to the second casing portion, thereby housing the anode and the cathode therein spaced from each other;
- and
- f) providing an electrolyte in the casing contacting the cathode and the anode.
Dependencies are inferred from the claim text.