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US 7,408,179 B2Granted
Transition radiation apparatus and method therefor
AssigneeIntel Corporation
InventorYashesh A. Shroff
Life of this patent
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AssigneeIntel Corporation
InventorYashesh A. Shroff
Estimating the term…
In one embodiment of the present invention, intervening material layers (208) are recessed (304) relative to membrane layers (208) thereby providing increased surface area contact between the membranes (208) and support posts (408). Increased surface area contact assists in reducing membrane shape changes (122) and defects (124, 126) that can result from thermal and physical stress. In an alternative embodiment, problems related to stiction during release of a stack of membranes (208) is reduced by using different processes to completely remove portions of intervening material layers (206) between membrane layers (208). The first process removes the bulk of the intervening material layer (206). The second process removes the remaining portions of the intervening material layer (602).
A transition radiation emitting structure comprising a plurality of membrane layers, wherein a portion of edge regions of at least one membrane layer is inset with respect to a sidewall of an adjoining support post structure, and wherein the at least one membrane layer only partially penetrates the adjoining support post structure.
A method for forming a transition radiation emitting structure comprising:
Dependencies are inferred from the claim text.