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US 7,408,177 B2Granted
Scintillator panel and radiation image sensor
AssigneeHamamatsu Photonics K.K.
InventorsTakuya Homme, Toshio Takabayashi, Hiroto Sato, Takaharu Suzuki, Yoshio Natsume
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Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
Claims7
A panel for detection of radiation ray, comprising:
- a support substrate on which a plurality of columnar crystals made of alkali-halide system material are formed and each of the columnar crystals has a needle shape;
- said support substrate comprising;
- a substrate;
- and
- a first organic film substantially enveloping said substrate;
- and
- said panel further comprising a second organic film substantially enveloping said columnar crystals formed on the support substrate and the support substrate.
4 more elements
Dependencies are inferred from the claim text.