Laser beam machine with cylindrical lens system

A laser beam machine with a cylindrical lens system comprising:

• a chuck table for holding a workpiece;
• a laser beam application means for applying a laser beam to the workpiece held on the chuck table, said laser beam application means including a laser beam oscillation means for oscillating a laser beam, and a condenser for converging the laser beam oscillated by the laser beam oscillation means;
• said condenser including a first cylindrical lens unit having a first cylindrical lens, a second cylindrical lens unit disposed at an interval from the first cylindrical lens unit and having a second cylindrical lens which has a converging direction perpendicular to that of the first cylindrical lens, and an interval adjustment mechanism for adjusting the interval between the first and second cylindrical lens units;
• and
• said interval adjustment mechanism including a support member, a first support table mounted on the support member and holding one of the first and second cylindrical lens units, a second support table mounted slidably on the support member at an interval from the first support table and holding the other of the first and second cylindrical lens units, said second support table being movable along the support member toward and away from the first support table, and a control means for adjusting the interval between the first and second support tables;
• wherein the first cylindrical lens unit comprises:
• a circular, first lens holding member holding the first cylindrical lens, a first frame having a circular hollow for accommodating the first lens holding member, a second frame for holding the first frame, a first turning adjustment means for turning the first lens holding member along an inner wall of the circular hollow, and a first moving adjustment means for moving the first frame relative to the second frame in a direction perpendicular to the converging direction of the first cylindrical lens;
• and
• wherein the second cylindrical lens unit comprises:
• a circular, second lens holding member holding the second cylindrical lens, a third frame having a circular hollow for accommodating the second lens holding member, a fourth frame for holding the third frame, a second turning adjustment means for turning the second lens holding member along an inner wall of the circular hollow of the third frame, and a second moving adjustment means for moving the third frame relative to the fourth frame in a direction perpendicular to the converging direction of the second cylindrical lens.