Yttria sintered body and corrosion-resistant material, and manufacturing method
AssigneeToto Ltd.
InventorsTakayuki Ide, Masakatsu Kiyohara
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Abstract
The object of the present invention is to provide an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In order to produce the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.
Claims3
An yttria sintered body obtained by adding a boron compound to an yttria (Y2O3) powder and firing, wherein a boron (B) is present in the yttria sintered body substantially as a Y3BO6.
A corrosion-resistant material used for a substrate processing apparatus comprising a Y2O3 crystal and a Y3BO6 crystal as the constituent crystal thereof.
Dependencies are inferred from the claim text.