Nanostructures, nanogrooves, and nanowires
AssigneeThe Regents of the University of California
InventorTing Guo
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Abstract
Compositions and methods for making nanostructures and nanowires on substrates, including but not limited to metal-semiconductor nanostructures and semiconductor nanowires on semiconductor substrates. Particularly described are methods for making cobalt silicide nanostructures on silicon substrates and for making silicon nanowires on silicon substrates using cobalt nanoparticles. Nanogrooves and methods of making nanogrooves. Methods of making silanes.
Claims15
A method for producing cobalt silicide nanostructures on a substrate, the method comprising heating at least a portion of a cobalt nanoparticle coated silicon substrate comprising a silicon substrate and cobalt nanoparticles in a heating temperature range of between about 700° C. and 1100° C.;
- and maintaining at least a portion of the nanoparticle coated substrate in a reaction temperature range of between about 700° C. and 1100° C. for a reaction time, wherein the cobalt silicide nanostructures comprise atoms from the silicon substrate and from the cobalt nanoparticles.
Dependencies are inferred from the claim text.