Display device and manufacturing method of the same
AssigneeHitachi Displays, Ltd.
InventorsTakuo Kaitoh, Eiji Oue, Takahiro Kamo, Yasukazu Kimura, Toshihiko Itoga
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AssigneeHitachi Displays, Ltd.
InventorsTakuo Kaitoh, Eiji Oue, Takahiro Kamo, Yasukazu Kimura, Toshihiko Itoga
Estimating the term…
The invention provides a method of manufacture of a display device which can achieve a reduction of the manufacturing process. In the manufacturing method, a semiconductor layer is formed over an upper surface of a substrate. An insulation film is formed over an upper surface of the semiconductor layer. Using a mask which covers a first region and exposes a second region, an implantation of impurities into the semiconductor layer is performed in the second region through the insulation film. After the mask is removed, a surface of the insulation film is etched in the first region and the second region to an extent that the insulation film in the second region remains, whereby the film thickness of the insulation film in the second region is set to be smaller than the film thickness of the insulation film in the first region.
A manufacturing method of a display device comprising the steps of:
A manufacturing method of a display device comprising the steps of:
Dependencies are inferred from the claim text.