Methods of manufacturing semiconductor thin film, electronic device and liquid crystal display device
AssigneeKabushiki Kaisha Toshiba
InventorTadashi Shimmura
Life of this patent
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Abstract
A semiconductor thin film manufacturing method includes: forming a semiconductor thin film on a substrate; forming a transcriptional body containing a metal element on a part thereof; bringing a part of the transcriptional body into contact with the semiconductor thin film, and transferring the metal element onto the semiconductor thin film; and fusing the semiconductor thin film and crystallizing the semiconductor thin film using the metal element of the solution as crystal producing nucleuses.
Claims20
A method of manufacturing a semiconductor thin film, the method comprising:
- forming a semiconductor thin film on a substrate;
- forming a transcriptional body on a part of the substrate, said transcriptional body having applied thereto a solution containing a metal element;
- bringing a transfer part of the transcriptional body into contact with the semiconductor thin film, and transferring the metal element onto the semiconductor thin film;
- and
- fusing the semiconductor thin film and crystallizing the semiconductor thin film using the metal element of the solution as crystal producing nucleuses.
A method of manufacturing a semiconductor thin film, the method comprising:
- forming a semiconductor thin film on a substrate;
- selectively applying a solution onto a part of a transcriptional body, the solution containing a metal element serving as crystal producing nucleuses;
- bringing a part of the transcriptional body into contact with the semiconductor thin film, and transferring the solution onto the semiconductor thin film;
- and
- fusing the semiconductor thin film and crystallizing the semiconductor thin film using the metal element of the solution as crystal producing nucleuses.
A method of manufacturing an electronic device, the method comprising:
- forming a semiconductor thin film on a substrate;
- selectively applying a solution onto a segmented surface of a transcriptional body, the solution containing a metal element serving as crystal producing nucleuses;
- bringing a part of the transcriptional body into contact with the semiconductor thin film and transferring the solution from the transcriptional body to the semiconductor thin film;
- and
- fusing the semiconductor thin film, crystallizing the semiconductor thin film using the metal element of the solution as crystal producing nucleuses, and making a semiconductor element.
A method of manufacturing a liquid crystal display device, the method comprising:
- forming a semiconductor thin film on a first transparent substrate;
- forming a transcriptional body containing a metal element serving as crystal producing nucleuses;
- bringing a part of the transcriptional body into contact with the semiconductor thin film and transferring the metal element of the transcriptional body onto the semiconductor thin film;
- fusing the semiconductor thin film and crystallizing the semiconductor thin film using the metal element as crystal producing nucleuses;
- forming a transistor on the crystallized semiconductor thin film;
- and
- placing a second transparent substrate on the first transparent substrate, and enclosing a liquid crystal between the first and second transparent substrates.
Dependencies are inferred from the claim text.