Liquid-phase growth apparatus and method
AssigneeCanon Kabushiki Kaisha
InventorsMasaki Mizutani, Katsumi Nakagawa, Takehito Yoshino, Shoji Nishida
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AssigneeCanon Kabushiki Kaisha
InventorsMasaki Mizutani, Katsumi Nakagawa, Takehito Yoshino, Shoji Nishida
Estimating the term…
A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a taw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.
A liquid-phase growth apparatus for growing a crystal on a substrate, comprising:
A liquid-phase growth apparatus for growing a crystal on a substrate, comprising:
A liquid-phase growth apparatus for growing a crystal on a substrate, comprising:
A liquid-phase growth apparatus for growing a crystal on a substrate, comprising:
Dependencies are inferred from the claim text.