Ink jet head substrate and ink jet head having metal carbon nitride resistor

An ink jet head comprising:

• an ink jet head substrate having a supporting structure and at least one heat-generating resistor disposed on the supporting structure to generate a thermal energy to eject ink, wherein the heat-generating resistor is made of metal carbon nitride represented as a chemical formula of MxCyNz, where M is metal, X is within about 20 through 80, Y is within about 3 through 25, and Z is within about 10 through 60, when X+Y+Z=100;
• and
• a chamber structure disposed on the inkjet head substrate to define at least one ink chamber having the heat-generating resistor therein, and having at least one aperture through which the ink is ejected.

An ink jet head comprising:

• an ink jet head substrate having a supporting structure, a heat-generating resistive layer pattern formed on the supporting structure and made of a tertiary compound including a metal component, carbon, and nitrogen in accordance with a chemical formula MxCyNz, where M is the metal component, X is within about 20 through 80, Y is within about 3 through 25, and Z is within about 10 through 60, when X+Y+Z=100, a conductive layer formed on a first and a second portions of the heat-generating resistive layer pattern to form wiring lines, a passivation layer formed on the wiring lines of the conductive layer and a third portion of the heat-generating resistive layer pattern disposed between the first and second portions, and an anti-cavitation layer formed on the passivation layer;
• and
• a chamber structure formed on the ink jet heat substrate to define an ink chamber and a nozzle to correspond to the third portion of the heat-generating resistive layer pattern.