G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane

A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:

• a substrate defining a top surface;
• spaced bonding pads attached to the substrate and projecting above the top surface of the substrate;
• a generally planar plate support member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the bonding pads by flexures, such that the support member is capable of oscillatory motion relative to the substrate about a drive axis that is in the plane of the support member and orthogonal to the input axis;
• a generally planar plate gyro member located within, coplanar with, and flexibly coupled to the support member such that the gyro member is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members in response to input rotation rate, and such that the gyro member will oscillate with the support member relative to the substrate about the drive axis, as the support member is oscillated about the drive axis;
• one or more support member drives for directly oscillating the support member about the drive axis, and thereby also oscillating the gyro member about the drive axis;
• one or more support member motion sensors that sense motion of the support member relative to the substrate about the drive axis;
• and
• one or more gyro member output sensors that detect oscillation of the gyro member relative to the support member about the output axis.