Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment

A semiconductor processing equipment for detecting a transfer shift of a transfer mechanism by using a dummy substrate different from a substrate to be processed in having a first guide for assisting a centering thereof, the dummy substrate serving as a substitute for the substrate to be processed, the equipment comprising:

• a processing chamber for performing a processing on the substrate to be processed;
• a placing table provided in the processing chamber, for mounting thereon the substrate to be processed during the processing;
• the transfer mechanism provided at an outside of the processing chamber, for transferring the substrate to be processed on the placing table;
• a detector provided at the outside of the processing chamber, for detecting an eccentricity and an eccentric direction of the substrate to be processed;
• a second guide for assisting the centering of the dummy substrate, the second guide centering the dummy substrate with respect to the placing table by being engaged with the first guide while the dummy substrate is transferred onto the placing table by the transfer mechanism;
• and
• a control unit for controlling an operation of the equipment, wherein the control unit performs the steps of:
• centering the dummy substrate with respect to the placing table by an engagement between the first and the second guides on or above the placing table;
• receiving and transferring the centered dummy substrate to the detector by using the transfer mechanism;
• and
• attaining detection values of an eccentricity and an eccentric direction of the dummy substrate by using the detector and then obtaining the transfer shift of the transfer mechanism based on the detection values.