Method of using an ultrathin optical element
AssigneeASML Holding N.V.
InventorNicholas A. DeLuca
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Abstract
The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of light in an optical system. In an embodiment, the optic is manufactured by disposing a pattern on a surface of a reticle. The pattern is covered with a first protective coating to protect the pattern. Individual optics are cut from the reticle so that each optic includes a portion of the pattern. The optic is thinned by removing material until it has an axial thickness of less than 1,000 microns. The optic is cleaned after thinning and covered with an anti-reflective coating.
Claims25
A method, comprising:
- (a) moving an optical element in a plurality of optical elements into a radiation path, wherein the optical element is individually movable in a plane containing the plurality of optical elements and comprises,
- a thickness between a first surface and a second surface of less than about 1,000 microns, and
- a surface having a pattern formed thereon;
- and
- (b) using the pattern to attenuate intensity of radiation travelling along the radiation path through the optical element.
A method, comprising:
- transmitting a radiation beam through a plurality of optical elements, each respective one of the optical elements comprising,
- a thickness between a first surface and a second surface of less than about 1,000 microns;
- and
- a pattern disposed on the first surface that attenuates light entering the optical element at the first surface,
- wherein each respective one of the optical elements is individually movable in a plane containing the plurality of optical elements,
- wherein the plurality of optical elements are also moveable as a unit.
A method, comprising:
- (a) transmitting a radiation beam substantially perpendicular to, and through, a plurality of optical elements, each optical element comprising,
- a thickness between a first surface and a second surface of less than about 1,000 microns, each optical element in the plurality of optical elements being individually movable in a plane containing the plurality of optical elements;
- and
- a pattern disposed on the first surface of each of the optical elements that attenuates light entering the optical elements at the first surface,
- wherein the plurality of optical elements are also moveable as a unit;
- (b) patterning the radiation beam;
- and
- (c) projecting the patterned beam onto a substrate.
A method, comprising:
- transmitting a radiation beam through a plurality of optical elements, each optical element in the plurality of optical element comprising,
- a thickness between a first surface and a second surface of less than 1,000 microns, each of the optical elements being individually movable in a plane containing the plurality of optical elements;
- and
- a dielectric coating disposed on the first surface of each of the optical elements that attenuates light entering the optical elements at the first surface,
- wherein the plurality of optical elements are also moveable as a unit.
A method, comprising:
- (a) transmitting a radiation beam of ultraviolet radiation substantially perpendicular to, and through, a plurality of optical elements, each optical element in the plurality of optical elements comprising,
- a thickness between a first surface and a second surface of less than about 1,000 microns, each of the optical elements being individually movable in a plane containing the plurality of optical elements;
- and
- a dielectric coating disposed on the first surface of each the optical elements that attenuates light entering the optical elements at the first surface,
- wherein the plurality of optical elements are also moveable as a unit;
- (b) patterning the radiation beam;
- and
- (c) projecting the patterned beam onto a substrate.
Dependencies are inferred from the claim text.