Method of fabricating microelectromechanical system structures

An anodically bonded component structure, comprising:

• at least first, second and third components anodically bonded in a predetermined order and having interfaces between adjacent said at least first, second and third components;
• at least one of said first, second and third components being comprised of a glass substrate and at least one of said first, second and third components being comprised of a conductive or semiconductive material;
• each of said at least first, second and third components having an upper and lower surface;
• an hydrogen-free amorphous film, comprised of silicon, silicon oxide or silicon nitride, over and in direct contact with one of said component surfaces at each interface comprising an adjacent:
• glass component;
• and
• conductive or semiconductive component;
• and
• a sol gel with or without alkaline ions film over and in direct contact with one of said component surfaces at each interface comprising an adjacent:
• conductive or semiconductive component;
• and
• conductive or semiconductive component.

A bonded component structure, comprising:

• at least first, second and third components anodically bonded in a predetermined order and having interfaces between adjacent said at least first, second and third components;
• at least one of said first, second and third components being comprised of a glass substrate and at least one of said first, second and third components being comprised of a conductive or semiconductive material;
• each of said at least first, second and third components having an upper and lower surface;
• an hydrogen-free amorphous film over and in direct contact with one of the component surfaces at each interface comprising an adjacent:
• glass component;
• and
• conductive or semiconductive component;
• and
• a sol gel with or without alkaline ions film over and in direct contact with one of the component surfaces at each interface comprising an adjacent:
• conductive or semiconductive component;
• and
• conductive or semiconductive component.