Method for analyzing fail bit maps of waters and apparatus therefor

A method for analyzing fail bit maps comprising:

• inputting positions of failures in wafers;
• preparing sections on the wafers;
• calculating feature amounts configured to represent distributions of the failures in the wafers for each of the sections by at least one numerical value;
• calculating a first numerical value configured to represent a degree of similarity between the feature amounts of the wafers;
• and
• detecting another wafer having the first numerical value greater than a predetermined first threshold for each of the wafers, and forming similar wafer groups of the wafers having the distributions of the failures similar to each other,
• wherein calculating the first numerical value includes at least one of:
• calculating a first correlation coefficient between the feature amounts of the wafers;
• performing a Fourier transformation regarding the feature amounts as waveforms and comparing first spectra of the Fourier transformation of the waveforms;
• and
• using a maximum entropy method.