Amorphous soft magnetic shielding and keeper for MRAM devices
AssigneeVeeco Instruments Inc.
InventorsJacques Constant Stefan Kools, Ming Mao, Thomas Schneider, Jinsong Wang, Michael Gutkin
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Abstract
An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.
Claims8
A method of fabricating a keeper for an MRAM device having a bit region and a current carrying line, the method comprising the steps of:
- providing an amorphous soft magnetic material via a deposition process performed in association with a current carrying line created in an MRAM fabrication process;
- and
- forming the amorphous soft magnetic material generally about the current carrying line to create one or more keeper regions of the amorphous soft magnetic material disposed in relative close proximity and/or adjacent to the current carrying line.
Dependencies are inferred from the claim text.